Technical Data: Current Status of Vacuum Ultraviolet Excimer Lamps and Their Industrial Applications
It is possible to break molecular bonds through non-thermal processes! Introduction to applications in the semiconductor-related field.
This document introduces the current status of "vacuum ultraviolet excimer lamps" and their industrial applications. Excimer refers to a dimer formed by one atom or molecule in an excited state and one atom or molecule in the ground state. The "vacuum ultraviolet excimer lamp" has features such as the ability to emit quasi-monochromatic light and short-wavelength light not found in general lamps, as well as the capability for instant lighting and flashing. Additionally, because vacuum ultraviolet light has a short wavelength and high photon energy, it can break molecular bonds through non-thermal processes. [Contents] ■ What is a vacuum ultraviolet excimer lamp? ■ Applications of vacuum ultraviolet excimer lamps *For more details, please refer to the PDF document or feel free to contact us.
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